High-frequency optoelectronic detector, system and method

ABSTRACT

An optoelectronic device for detecting electromagnetic radiation and including: a body of semiconductor material delimited by a main surface and including a first region and a second region that form a junction; and a recess formed in the body, which extends from the main surface and is delimited at least by a first wall, the first wall being arranged transverse to the main surface. The junction faces the first wall.

PRIORITY CLAIM

The present application claims priority to Italian Patent ApplicationNo. TO2012A000584, filed Jul. 2, 2012, which application is incorporatedherein by reference in its entirety.

TECHNICAL FIELD

The present disclosure relates to a high-frequency optoelectronicdetector.

BACKGROUND

In general, an optoelectronic detector is an electronic device that,when it receives electromagnetic radiation, generates an electricalsignal indicating characteristics of this electromagnetic radiation. Forexample, among optoelectronic detectors are numbered photodiodes andphototransistors.

With reference, purely by way of example, to photodiodes, they may havea planar structure, or else a so-called MESA structure.

As illustrated in FIG. 1a , a MESA structure of a photodiode 1 is formedby a semiconductor body 2, which comprises, in addition to a substrate3, a first epitaxial layer 4 and a second epitaxial layer 6, which forma PN junction. The semiconductor body 2 is formed by means of epitaxialgrowth of the first and second epitaxial layers 4, 6, and subsequent wetchemical etching so that the profile of the semiconductor body 2 formsprecisely a structure that evokes a mesa, which is delimited by sidewalls L that have a slope gradually decreasing starting from the secondepitaxial layer 6 towards the substrate 3. The anode and cathodemetallizations are not illustrated in FIG. 1 a.

As illustrated in FIG. 1b , in a planar structure of the photodiode 1,the semiconductor body 2 is formed not only by the substrate 3 but alsoby the first epitaxial layer 4, by a semiconductor well 8, which isformed by means of a process of diffusion within the first epitaxiallayer 4, with which it forms the PN junction. The anode and cathodemetallizations are not illustrated in FIG. 1b either.

In general, the MESA structure prevents leakages caused by dicing of thewafer in which the photodiode is formed, this dicing typically damagesthe crystalline structure of the semiconductor material. As regards,instead, the planar structure, it is characterized by a high level ofreliability since, by appropriately designing the semiconductor well 8,the PN junction is prevented from being exposed to external agents,which may potentially alter the PN junction, causing an increase of theleakages.

With reference, purely by way of example, to the planar structure,operation of the photodiode 1 is illustrated in FIG. 2, where designatedby I is the interface surface between the first epitaxial layer 4 andthe semiconductor well 8.

In use, the photodiode 1 is reversely biased. In addition, formed at theinterface surface I is a depleted or depletion region 10, which extendsin part in the semiconductor well 8 and in part in the first epitaxiallayer 4. Present within the depletion region 10 is an electric field,which, on the basis of semiconductor well 8 being of a P type and firstepitaxial layer 4 of an N type, is directed from the first epitaxiallayer 4 towards the semiconductor well 8.

Assuming that an optical pulse 11 is impinging upon the photodiode 1,the photodiode 1 generates a corresponding electrical signal, which isformed by a first component and a second component. The first componentis formed by the charge carriers generated following upon absorption ofphotons in the depletion region 10, whilst the second component isgenerated by the charge carriers that are generated following absorptionof photons in regions different from the depletion region 10, thesecharge carriers diffusing slowly until they reach the depletion region10. An example of an electrical signal generated responsive to opticalpulse 11 is illustrated in FIG. 3, where the first and second componentsare designated by 1C and 2C.

In practice, the first component is a so-called “fast component”, ascompared to the second component, which is also known as “slowcomponent”. In fact, once the optical pulse 11 impinges upon thephotodiode 1, the first component is generated before the secondcomponent; moreover, the first component is characterized by a timederivative greater than the derivative of the second component. Ingreater detail, as the electric field increases in the depletion region10, the speed of the (minority) charge carriers increases within thedepletion region 10, and hence the rapidity of generation of the firstcomponent increases, with consequent increase of the maximum operatingfrequency of the photodiode 1 itself. It is hence possible, for example,to detect correctly an optical signal modulated at high frequency with amodulation of the ON-OFF type.

SUMMARY

The aim of the present disclosure is to provide an optoelectronicdetector that will have a further increased operating frequency.

According to an embodiment of the present disclosure an optoelectronicdevice operable to detect electromagnetic radiation includes a body ofsemiconductor material delimited by a main surface and including a firstregion and a second region that form a junction. A recess is formed inthe body, which extends from the main surface, and is delimited at leastby a first wall. The first wall is arranged transverse to the mainsurface and the junction faces the first wall.

BRIEF DESCRIPTION OF THE DRAWINGS

For a better understanding of the present invention, preferredembodiments thereof are now described, purely by way of non-limitingexamples, with reference to the attached drawings, wherein:

FIGS. 1a and 1b are schematic illustrations of cross sections of knownphotodiodes;

FIG. 2 is a schematic illustration of a cross section of a knownphotodiode of a planar type;

FIG. 3 is a qualitative time plot of an electrical signal (expressed inarbitrary units) generated by the photodiode illustrated in FIG. 2,following impinging of an optical pulse;

FIG. 4 is a schematic illustration of a cross section of one embodimentof the present optoelectronic detector;

FIG. 5 is a schematic illustration of a cross section of one embodimentof the present optoelectronic detector, taken along a line of crosssection V-V illustrated in FIG. 6;

FIG. 6 is a schematic illustration of a top plan view of theoptoelectronic detector illustrated in FIG. 5;

FIG. 7 is a schematic illustration of a cross section of a differentembodiment of the present optoelectronic detector;

FIG. 8a is a schematic illustration of a cross section of a furtherembodiment of the present optoelectronic detector, taken along a line ofcross section VIIIa-VIIIa illustrated in FIG. 8 b;

FIG. 8b is a schematic illustration of a top plan view of theoptoelectronic detector illustrated in FIG. 8a ; and

FIG. 9-14 are schematic illustrations of cross sections of furtherembodiments of the present optoelectronic detector.

DETAILED DESCRIPTION

FIG. 4 shows a photodiode 20, which includes a body 22 of semiconductormaterial and a first well 24 and a second well 26, which are also madeof semiconductor material. The body 22 may include, in a way in itselfknown, a substrate and one or more epitaxial layers (not illustrated);moreover, the body 22 forms a first main surface S1 and a second mainsurface S2.

The first well 24 extends from the first main surface S1 and issurrounded at the bottom and laterally by the body 22, with which it isin direct contact.

The second well 26 extends from the first main surface S1 and issurrounded at the bottom and laterally by the first well 24, with whichit is in direct contact. Purely by way of example, in the embodimentillustrated in FIG. 4, the first and second wells 24, 26 are doped,respectively, N and P.

The first and second wells 24, 26 hence form a PN junction and form afirst interface surface I1, which separates the first well 24 from thesecond well 26.

The photodiode 20 further includes an anode contact and a cathodecontact (not illustrated), coupled, respectively, to the second well 26and to the first well 24 and designed to enable reverse biasing of thePN junction. In use, a depletion region 28 is thus formed, which extendsthrough the first interface surface I1, and hence extends in part withinthe first well 24 and in part within the second well 26.

The photodiode 20 moreover forms a recess 30, which extends from thefirst main surface S1 and traverses the first well 26 and, at least inpart, the second well 24.

In detail, the recess 30 is delimited laterally by a first side wall P1and a second side wall P2, each of which is of a plane type and istransverse with respect to the first main surface S1; in particular,each one between the first side wall P1 and the second side wall P2extends from the first main surface S1 and forms with it a nonzero angleother than 90°. Even more in particular, the first side wall P1 and thesecond side wall P2 form with the first main surface S1 an angle θ1 andan angle θ2 respectively, each of which is between 100° and 170°, inorder to enable coupling of electromagnetic radiation coming fromoutside the photodiode 20, as described in detail hereinafter.

The recess 30 extends so that the first and second side walls P1, P2 arein contact with the first and second wells 24, 26. In other words, thePN junction formed by the first and second wells 24, 26 faces the firstand second side walls P1, P2, i.e., gives out onto the recess 30.Furthermore, assuming an orthogonal reference system xyz, formed by theaxes x, y, and z and such that the first and second main surfaces S1 andS2 are parallel to the plane xz, the embodiment illustrated in FIG. 4 issuch that the first and second side walls P1, P2 are arranged specularlywith respect to an axis H parallel to the axis y.

In addition, the first and second side walls P1, P2 are in mutualcontact and form an angle φ between 10° and 170°. More in particular, inorder to maximize coupling of the electromagnetic radiation to thephotodiode 20, the angle φ is between 70° and 110° and is, for example,equal to 90°. Even more in particular, the first and second side wallsP1, P2 form a line of contact 35, which lies within the first well 24.

The first interface surface I1 contacts both the first side wall P1 andthe second side wall P2, which are arranged transverse to the firstinterface surface I1. In particular, the portions of the first interfacesurface I1 that are in contact with the first and second side walls P1,P2 are substantially parallel to the plane xz, and hence to the firstmain surface S1; consequently, the first and second side walls P1, P2form with the first interface surface I1 angles, respectively, equal toθ1 and θ2 (equivalently, to 180°-θ1 and 180°-θ2). In other words, the PNjunction formed by the first and second wells 24, 26 has a portion thatcontacts the first and second side walls P1, P2, this portion beingsubstantially parallel to the first main surface S1.

In use, within the portions of the depletion region 28, which arearranged in contact with the first and second side walls P1, P2, thereis thus a thickening and a progressive inclination of the lines of forceof the electric field E, the closer these lines of force are to thefirst and second side walls P1, P2. In particular, the closer the linesof force are to the first and second side walls P1, P2, the more theytend to be parallel to these latter. Furthermore, if we designate as an“optical signal” 37 the electromagnetic radiation coming from theoutside world, the optical signal penetrates into the recess 30 andthanks to the inclination of the first and second side walls P1, P2,couples to the photodiode 20, penetrating into the depletion region 28,and in particular into portions of the depletion region 28 in which theelectric field is particularly high. The photons of the optical signal37 can thus be absorbed in these high-electric-field portions,generating charge carriers that are accelerated by this electric field.By increasing doping of the second well 26 locally and in the proximityof the recess 30, it is moreover possible to obtain thinning-out (notillustrated) of the depletion region 28 so as to reduce the mean freepath of the charge carriers (electrons and holes) through the depletionregion 28.

The photodiode 20 is then characterized in that it supplies, in responseto an optical signal, an electrical signal 37, the (so-called) fastcomponent, of which, i.e., the component deriving from the chargecarriers generated following upon absorption of photons within thedepletion region 28, is generated with high rapidity. In fact, aspreviously explained, these charge carriers are subjected to a highelectric field E. In other words, given a generic instant at which theoptical signal 37 penetrates into the depletion region 28, the delay ofthe corresponding instant at which the photodiode 20 generates thecorresponding electrical signal decreases. It follows that thephotodiode 20 is characterized by a high operating frequency.

According to a different embodiment (illustrated in FIG. 5), arrangedbetween the first and second wells 24, 26 is an intrinsic region 32. Therecess 30 extends so as to traverse the intrinsic region 32 completely.In this way, if we designate by “first interface surface I1” the surfaceof separation between the second well 26 and the intrinsic region 32,and by “second interface surface I2” the surface that separates theintrinsic region 32 from the first well 24, both the first interfacesurface I1 and the second interface surface I2 are in contact both withthe first side wall P1 and with the second side wall P2.

In practice, the embodiment illustrated in FIG. 5 regards a photodiodeof the so-called PIN, instead of PN, type since the intrinsic region 32and the first and second wells 24, 26 form precisely a junction of a PINtype. Furthermore, as illustrated purely by way of example in FIG. 6,the intrinsic region 32 and the first and second wells 24, 26, as on theother hand also the recess 30, have the shape, in top plan view, of arectangle with rounded corners. It should be noted that, in thisembodiment, the depletion region 28, in addition to extending in partinto the first and second wells 24, 26, occupies entirely the intrinsicregion 32.

As illustrated in FIG. 7, moreover possible are different embodiments,where the photodiode 20 has a cross section such that the first andsecond side walls P1, P2 are not in mutual contact, but are coupled by athird side wall P3, which extends within the first well 24, parallel tothe first main surface S1.

Moreover possible are embodiments of the type illustrated in FIGS. 8aand 8b . According to this embodiment, the photodiode 20 has a firstcross section and a second cross section, obtained by sectioning withtwo planes parallel to the plane xy and corresponding, respectively, toa first value and a second value of the co-ordinate z, said first andsecond cross sections being different from one another. In particular,the first cross section is equal to the cross section illustrated inFIG. 7, while the second cross section is illustrated in FIG. 8a . Inpractice, according to this embodiment, the recess 30 has the shape, intop plan view, of a cross. In this way, with respect to the embodimentillustrated in FIG. 6, the area of the depletion region 28 exposed tothe electromagnetic radiation is found to be increased, and consequentlythe intensity of the electrical signal generated by the photodiode 20increases. Further embodiments are in any case possible, where therecess 30 has a comb-fingered shape in top plan view.

As illustrated in FIG. 9, with reference by way of example to the caseof a photodiode of a PIN type, the photodiode 20 may include a top layer40, which extends over the first main surface S1, with which it is indirect contact.

The top layer 40 is designed to enable propagation of the optical signaland occupies the recess 30, being arranged in direct contact with thefirst and second side walls P1, P2. In order to enable propagation ofthe optical signal, the top layer 40 is made of a material having arefractive index greater than the refractive index of the semiconductormaterial that forms the body 22.

In detail, the top layer 40 has a contact portion 50, which occupies therecess 30; the contact portion 50 in direct contact with the first andsecond interface surfaces I1, I2, i.e., is in contact with the intrinsicregion 32 and with the first and second wells 24, 26. Furthermore, thecontact portion 50 has, for example, a constant thickness along the axisx. Consequently, in addition to being delimited at the bottom by thefirst and second side walls P1, P2, the contact portion 50 is delimitedat the top by a third side wall P3 and a fourth side wall P4,respectively, parallel to the first and second side walls P1, P2;moreover, the third and fourth side walls P3, P4 are at one and the samedistance (equal to the thickness of the top layer) from the first sidewall P1 and the second side wall P2, respectively.

The top layer 40 is moreover delimited, at one of its ends, by a fifthside wall P5, which is also of a planar type. The fifth side wall P5 islaterally staggered with respect to the first and second side walls P1,P2 and also overlies the intrinsic region 32 and the first and secondwells 24, 26; moreover the fifth side wall P5 overlies the first mainsurface S1, with respect to which it is inclined by an angle equal, forexample, to 45°. An additional region 52 is arranged in contact with thefifth side wall P5, on top of the first main surface S1. This additionalregion 52 has a refractive index less than the refractive index of thematerial that forms the top layer 40.

In use, an optical signal 41 propagates along the top layer 40 until itreaches the contact portion 50 where, on account of reflections at thefirst and third side walls P1, P3, it is in part directed in thedepletion region 28, with consequent generation of the correspondingelectrical signal. Part of the optical signal traverses, however, thecontact portion 50, continuing to propagate along the top layer 40 untilit reaches the fifth side wall P5, where it is reflected in thedirection of the depletion region 28. In this way, the efficiency of thecoupling between the photodiode 20 and the top layer 40 is increased.

As illustrated in FIG. 10, assuming that the body 22 moreover forms afirst side surface SI1 and a second side surface SI2, the top layer 40may extend laterally between a first side surface SI1 and a second sidesurface SI2. Furthermore, as illustrated once again in FIG. 10, betweenthe top layer 40 and the body 22 there may be arranged a first coatinglayer 60, which extends on the first main surface S1; in this case, thecontact portion 50 extends through the first coating layer 60.Furthermore, extending on top of the top layer 40, and in direct contacttherewith, is a second coating layer 62. The first and second coatinglayers 60, 62 may be made of one and the same material, which has arefractive index less than the refractive index of the material thatforms the top layer 40 so that the top layer 40 and the first and secondcoating layers 60, 62 form a waveguide, optically coupled to thedepletion region 28.

In a different embodiment, illustrated in FIG. 11, the fourth side wallP4, instead of being parallel to the second side wall P2, is coplanar tothe first main surface S1. Furthermore, the first and second side wallsP1, P2 are coated, respectively, by a first anti-reflection layer 70 anda second anti-reflection layer 72, which have, for example, thicknessesequal to integer and odd multiples of a quarter of the wavelength of theoptical signal. This embodiment performs the function of causing theoptical signal to be absorbed entirely by the photodiode 20.

FIG. 12 shows, instead, a phototransistor 75 of the so-called bipolartype, where the body 22 has a doping of a P type, and where, within thesecond well 26, there extends a third well 78, of an N type and arrangedlaterally at a distance from the recess 30. FIG. 12 moreover shows thecollector, base, and emitter contacts, which are designated,respectively, by CC, CB and CE and contact, respectively, the first,second, and third wells 24, 26, 78.

In a further embodiment (illustrated in FIG. 13), the third well 78 hasthe shape, in top plan view, of an annulus or of a polygon and isarranged so as to surround the recess 30, from which it is arrangedlaterally at a distance; in this way, a symmetrical structure is formedthat benefits from the advantages provided by the recess 30. Even thoughit is not illustrated, a decoupling layer, of an N+ type, may be setbetween the first well 24 and the body 22, in order to reduce theelectrical resistance between them.

FIG. 14 shows, instead, a phototransistor 90 of a MOS type, where thethird well, designated by 92, is of a P+ type and extends within thefirst well 24, starting from the first main surface S1. Furthermore, thephototransistor 90 includes the fourth well, designated by 94, which isof an N+ type and also extends within the first well 24, starting fromthe first main surface S1. The second well 26 is arranged laterally at adistance, between the third and fourth wells 92, 94.

On top of the first main surface S2 there extends a dielectric region96, laterally staggered with respect to the second and third wells 26,92, with which it is in direct contact; the dielectric region 96 ismoreover in direct contact with the first well 24. Extending on top ofthe dielectric region 96, and in direct contact therewith, is aconductive region 98, which forms precisely a MOS structure with thedielectric region 96 and the first well 24. FIG. 14 moreover showssource, gate, and drain contacts, which are designated, respectively, byCS, CG, and CD, and contact, respectively, the third well 92, theconductive region 98, and the second well 26. Moreover, FIG. 14 shows inbiasing contact Vbias, which contacts the fourth well 94 in order toenable biasing of the first well 24 and enable the phototransistor 90 tofunction correctly.

In other embodiments, an optoelectronic device or detector according theabove described embodiments or other embodiments may be contained withinan integrated circuit, such as an image sensor. Moreover, the integratedcircuit may be contained in an electronic system, such as a smartphone,digital camera, or computer system. The electronic system may, forexample, include a first integrated circuit such as an image sensorcoupled to a second integrated circuit like a processor, where the imagesensor and processor may be formed on the same semiconductor die or ondifferent semiconductor dies.

The advantages that the present optoelectronic detector affords emergeclearly from the foregoing description. In particular, irrespective ofwhether the present optoelectronic detector forms a photodiode, aphototransistor of a bipolar type or MOS type, or else some other kindof optoelectronic device, it is characterized by a high operatingfrequency, as well as a high sensitivity, obtained by means of increaseof the electric field within the depletion region.

Finally, it is clear that modifications and variations may be made withrespect to what has been described and illustrated herein, withoutthereby departing from the sphere of protection of the presentinvention, as defined in the annexed claims.

For example, as mentioned previously, embodiments regardingoptoelectronic devices and components are possible that differ from theones described and illustrated. Furthermore, all the types of doping canbe reversed with respect to what has been described previously. Inaddition to this, instead of the intrinsic region 32, there may bepresent a region with a low level of doping, of a P type or N type.

It is likewise possible for the recess to be arranged so that the firstand second wells, as well as the intrinsic region (if present) arearranged all on one and the same side with respect to the recess.

What is claimed is:
 1. An optoelectronic device, comprising: a body ofsemiconductor material, the body including a first main surface; a firstregion formed in the body; a second region formed within the firstregion, wherein the first and second regions are of oppositeconductivity types to form a junction between the first and secondregions and a depletion region at the junction; a recess extending fromthe first main surface of the body through the second region and intothe first region to intersect the depletion region at a sidewall of therecess; a top layer formed over the first main surface that includes aportion formed in the recess, the top layer having an index ofrefraction that is greater than an index of refraction of the body andbeing operable to expose the intersected depletion region at saidsidewall to electromagnetic radiation propagating through the top layer;wherein the recess includes a first side wall having a first anglerelative to the first main surface of the body, said first angle beingbetween, but not equal to either of, zero and ninety degrees.
 2. Theoptoelectronic device of claim 1, wherein the recess includes a secondside wall having a second angle relative to the first main surface ofthe body, said second angle being between, but not equal to either of,zero and ninety degrees.
 3. The optoelectronic device of claim 2,wherein the first and second angles are equal to each other.
 4. Theoptoelectronic device of claim 1, wherein the junction is a junction ofa planar structure type photodiode.
 5. An optoelectronic devicecomprising: a body of semiconductor material, the body including a firstmain surface; a first region formed in the body; a second region formedwithin the first region, wherein the first and second regions are ofopposite conductivity types to form a junction between the first andsecond regions and a depletion region at the junction; a recessextending from the first main surface of the body through the secondregion and into the first region to intersect the depletion region at asidewall of the recess, wherein said recess is configured to expose theintersected depletion region at said sidewall to electromagneticradiation; wherein the recess includes a first side wall having a firstangle relative to the first main surface of the body, said first anglebeing between, but not equal to either of, zero and ninety degrees; athird region formed within the second region; and wherein the firstregion corresponds to a collector, the second region corresponds to abase, and the third region corresponds to an emitter of a bipolarjunction transistor.
 6. The optoelectronic device of claim 5 wherein thethird region comprises an annular region that surrounds the recess. 7.An optoelectronic device comprising: a body of semiconductor material,the body including a first main surface; a first region formed in thebody; a second region formed within the first region, wherein the firstand second regions are of opposite conductivity types to form a junctionbetween the first and second regions and a depletion region at thejunction; a recess extending from the first main surface of the bodythrough the second region and into the first region to intersect thedepletion region at a sidewall of the recess, wherein said recess isconfigured to expose the intersected depletion region at said sidewallto electromagnetic radiation; wherein the recess includes a first sidewall having a first angle relative to the first main surface of thebody, said first angle being between, but not equal to either of, zeroand ninety degrees; a third region formed within the first region; andwherein the first region corresponds to a body, the second regioncorresponds to a drain, and the third region corresponds to a source ofa MOS transistor.
 8. An optoelectronic device, comprising: a body ofsemiconductor material, the body including a first main surface; a firstregion having a first conductivity type formed in the body; a secondregion of intrinsic material formed within the first region; a thirdregion having a second conductivity type opposite the first conductivitytype formed within the second region to form a junction between thefirst, second and third regions and a depletion region at the junction;a recess extending from the first main surface of the body through thesecond and third regions and into the first region to intersect thedepletion region in the recess; a top layer formed over the first mainsurface that includes a portion formed in the recess, the top layerhaving an index of refraction that is greater than an index ofrefraction of the body and being operable to expose the intersecteddepletion region to electromagnetic radiation propagating through thetop layer; wherein the recess includes a first side wall having a firstangle relative to the first main surface of the body, said first anglebeing between, but not equal to either of, zero and ninety degrees. 9.The optoelectronic device of claim 8, wherein the junction is PIN typejunction comprising the first region being an N type semiconductormaterial, the second region being an intrinsic semiconductor material,and the third region being a P type semiconductor material.
 10. Theoptoelectronic device of claim 8, wherein the recess comprises a secondside wall extending from the first main surface into the first region;and wherein the recess comprises a third side wall extending within thefirst region between the first and second side walls, the third sidewall having a surface that is substantially parallel to the first mainsurface.
 11. The optoelectronic device of claim 10, wherein the recesshas a cross shape when viewed in a plan parallel to the first mainsurface.
 12. An optoelectronic device comprising: a body ofsemiconductor material, the body including a first main surface; a firstregion having a first conductivity type formed in the body; a secondregion of intrinsic material formed within the first region; a thirdregion having a second conductivity type opposite the first conductivitytype formed within the second region to form a junction between thefirst, second and third regions and a depletion region at the junction;a recess extending from the first main surface of the body through thesecond and third regions and into the first region to intersect thedepletion region in the recess for exposure of the intersected depletionregion to electromagnetic radiation; wherein the recess includes a firstside wall having a first angle relative to the first main surface of thebody, said first angle being between, but not equal to either of, zeroand ninety degrees; and a top layer formed over the first main surfacethat includes a portion formed in the recess, the top layer having anindex of refraction that is greater than an index of refraction of thebody and being operable to enable electromagnetic radiation in the formof an optical signal to propagate through the top layer to the depletionregion.
 13. The optoelectronic device of claim 12, wherein the recesshas a second side wall extending from the first main surface into thefirst region; wherein the portion of the top layer has a third side wallthat is parallel to the first side wall; and wherein the portion of thetop layer has a fourth side wall that is parallel to the second sidewall.
 14. The optoelectronic device of claim 12 further comprising: afirst coating layer formed on the first main surface of the body withthe top layer being formed on the first coating layer; a second coatinglayer formed on the top layer and on the third and fourth sidewalls ofthe portion of the top layer; and wherein the top layer and the firstand second coating layers form a waveguide to direct electromagneticradiation in the form of an optical signal to the depletion region inthe recess.
 15. An optoelectronic device, comprising: a body ofsemiconductor material, the body including a first main surface; a firstregion having a first conductivity type formed in the body; a secondregion of intrinsic material formed within the first region; a thirdregion having a second conductivity type opposite the first conductivitytype formed within the second region to form a junction between thefirst, second and third regions and a depletion region at the junction;a recess extending from the first main surface of the body through thesecond and third regions and into the first region to intersect thedepletion region in the recess for exposure of the intersected depletionregion to electromagnetic radiation; wherein the recess includes a firstside wall having a first angle relative to the first main surface of thebody, said first angle being between, but not equal to either of, zeroand ninety degrees; wherein the recess has a second side wall extendingfrom the first main surface into the first region; wherein a firstanti-reflection layer is formed on the first side wall and a secondanti-reflection layer is formed on the second side wall; wherein a firstcoating layer is formed on a portion of the first main surface; whereina top layer is formed on the first coating layer and includes a portionformed in the recess on the first and second anti-reflection layers;wherein the portion of the top layer has a third side wall that isparallel to the first side wall; wherein the portion of the top layerhas a fourth side wall that is parallel to the first main surface; andwherein a second coating layer is formed on the top layer and on theportion of the first main surface on which the first coating layer isnot formed.
 16. An integrated circuit, comprising: an optoelectronicdevice including, a body of semiconductor material, the body including afirst main surface; a first region formed in the body; a second regionformed within the first region, wherein the first and second regions areof opposite conductivity types to form a junction between the first andsecond regions and a depletion region at the junction; a recessextending from the first main surface of the body through the secondregion and into the first region to intersect the depletion region inthe recess; and a light guide extending over the first main surface andinto said recess, said light guide configured to direct an opticalsignal onto said intersected depletion region; wherein the recessincludes a first side wall having a first angle relative to the firstmain surface of the body, said first angle being between, but not equalto either of, zero and ninety degrees.
 17. The integrated circuit ofclaim 16, wherein the junction comprises one of a photodiode and atransistor.